The SMFL sees many types of substrates and materials. Some pose cross-contamination threats.

We detail here the specifics on processing certain materials in the SMFL.

(warning) All tools in the SMFL have a list of accepted materials. If your material/substrate is not on the accepted list for the tool, you may not run it.

Generally Accepted Materials

Refractory Metals
Aluminum

Restricted Materials

Copper

(warning) Copper is very mobile in silicon at lower temperatures and can cause serious degradation of device properties.

(red star) Users wishing to process copper in the SMFL should contact the staff and present a detailed process flow.

Gold

(warning) Gold is similar to copper in that it can be deposited on wafers through baths such as HF. It can then make its way into high temperature furnaces and contaminate the quartzware and even the heating coils where it then contaminates other wafers on an ongoing basis.

(red star) Users wishing to process gold in the SMFL should contact the staff and present a detailed process flow.

High Vapor Pressure Materials
Gallium Arsenide