SMFL Services and Capabilities

The capabilities of the SMFL include:

The SMFL offers a wide range of services from single process up to foundry services.
It is by no means a complete list, please contact us so that we can discuss your needs.

Foundry Services

The SMFL has a 2um CMOS process with an effective L of 1.5um.

If you require this information or a quote on your process, please contact T. Grimsley

Single Process Services

Metrology

Scanning Electron Microscopy
There are several SEMs available for imaging a variety of samples.

Film Thickness - Ellipsometry

Film Thickness - Profilometry

Film Thickness - Optical

Resistivity Measurements'

Thin Film Deposition

Sputter Deposition

Thermal Evaporation

Electron Beam Evaporation
The SMFL has a CHA Ebeam Evaporator with a 3KV electron beam gun with an eight pocket carousel.

Plasma Enhanced Chemical Vapor Deposition (PECVD)
The SMFL has an Applied Materials P5000 systems equipped with two deposition chambers

Low Pressure Chemical Vapor (LPCVD)

A complete listing of all of the Tools in the SMFL can be found here