Space Tools

Name Size Creator Creation Date Last Modification Date Labels Attached To
PNG File 10 s, 150 mT, 1000W, 60 Cl2 01.png 477 kB Neal Lafferty (RIT Alumni) Jul 02, 2014 19:06 Jul 02, 2014 19:06
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Page: Lam 4600 Process Information
File 10 s, 150 mT, 1000W, 60 Cl2 01.tif 770 kB Neal Lafferty (RIT Alumni) Jul 02, 2014 19:05 Jul 02, 2014 19:05
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Page: Lam 4600 Process Information
PNG File 10 s, 150 mT, 1000W, 60 Cl2 03.png 466 kB Neal Lafferty (RIT Alumni) Jul 02, 2014 19:07 Jul 02, 2014 19:07
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Page: Lam 4600 Process Information
PNG File 10 s, 150 mT, 1000W, 60 Cl2 09.png 480 kB Neal Lafferty (RIT Alumni) Jul 02, 2014 19:07 Jul 02, 2014 19:07
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Page: Lam 4600 Process Information
File 100um6.tif 772 kB Sean O'Brien May 28, 2014 14:04 May 28, 2014 14:04
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Page: STS ASE Process Information
Microsoft Word 97 Document 150 mm SVG Programs.doc 72 kB Sean O'Brien Jul 31, 2013 13:09 Jul 31, 2013 13:09
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Page: g-line Process for SVG Track and GCA Stepper
PDF File 150 mm SVG Programs.pdf 62 kB Sean O'Brien Jul 31, 2013 13:11 Jul 31, 2013 13:11
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Page: g-line Process for SVG Track and GCA Stepper
JPEG File 5a 5um under dev.jpg 99 kB Sean O'Brien Jul 31, 2013 11:11 Jul 31, 2013 11:11
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Page: Metal Lift-off Using a Bi-layer Process
JPEG File 5a 5um.jpg 101 kB Sean O'Brien Jul 31, 2013 11:10 Jul 31, 2013 11:10
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Page: Metal Lift-off Using a Bi-layer Process
JPEG File 6.jpg 242 kB Thomas Grimsley Jul 19, 2012 13:30 Jul 19, 2012 13:30
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Page: Services Offered
PDF File 610C POLY 042109.pdf 34 kB Sean O'Brien Jul 30, 2013 14:15 Jul 30, 2013 14:15
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Page: Polysilicon Deposition
PDF File 630C POLY 012510.pdf 34 kB Sean O'Brien Jul 30, 2013 14:15 Jul 30, 2013 14:15
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Page: Polysilicon Deposition
PDF File 650C POLY 042109.pdf 34 kB Sean O'Brien Jul 30, 2013 14:15 Jul 30, 2013 14:15
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Page: Polysilicon Deposition
JPEG File AG rtp 600AB_2.jpg 539 kB Thomas Grimsley Sep 04, 2012 19:55 Sep 04, 2012 19:55
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Page: AG 610A RTP
JPEG File Al_through_tubes.JPG 7.74 MB Thomas Grimsley Jun 15, 2012 09:28 Jun 15, 2012 09:28
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Page: Tool Set
JPEG File Alum descum.JPG 25 kB Sean O'Brien Jun 19, 2013 16:38 Jun 19, 2013 16:39
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Page: Aluminum Etch
JPEG File ame p5000 14.jpg 471 kB Thomas Grimsley Jun 27, 2012 08:36 Jun 27, 2012 08:36
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Page: AME P5000 Chamber B
JPEG File ape p5000 installed.jpg 769 kB Thomas Grimsley Jun 29, 2012 08:57 Jun 29, 2012 08:57
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Page: AME P5000 Chamber C
JPEG File ape p5000 installed.jpg 769 kB Thomas Grimsley Jun 27, 2012 08:37 Jun 27, 2012 08:37
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Page: AME P5000 Chamber A
JPEG File asm 6.JPG 263 kB Thomas Grimsley Jun 28, 2012 06:25 Jun 28, 2012 06:25
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Page: ASM LPCVD Tube 2
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