Space Tools

Name Size Creator Creation Date Last Modification Date Labels Attached To
PNG File 10 s, 150 mT, 1000W, 60 Cl2 09.png 480 kB Neal Lafferty (RIT Alumni) Jul 02, 2014 19:07 Jul 02, 2014 19:07
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Page: Lam 4600 Process Information
PNG File 10 s, 150 mT, 1000W, 60 Cl2 03.png 466 kB Neal Lafferty (RIT Alumni) Jul 02, 2014 19:07 Jul 02, 2014 19:07
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Page: Lam 4600 Process Information
PNG File 10 s, 150 mT, 1000W, 60 Cl2 01.png 477 kB Neal Lafferty (RIT Alumni) Jul 02, 2014 19:06 Jul 02, 2014 19:06
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Page: Lam 4600 Process Information
File 10 s, 150 mT, 1000W, 60 Cl2 01.tif 770 kB Neal Lafferty (RIT Alumni) Jul 02, 2014 19:05 Jul 02, 2014 19:05
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Page: Lam 4600 Process Information
File 100um6.tif 772 kB Sean O'Brien May 28, 2014 14:04 May 28, 2014 14:04
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Page: STS ASE Process Information
PDF File COAT 092513.pdf 9 kB Sean O'Brien Oct 08, 2013 11:30 Oct 08, 2013 11:30
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Page: i-line Process for SSI Track and ASML Stepper
PDF File 150 mm SVG Programs.pdf 62 kB Sean O'Brien Jul 31, 2013 13:11 Jul 31, 2013 13:11
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Page: g-line Process for SVG Track and GCA Stepper
Microsoft Word 97 Document 150 mm SVG Programs.doc 72 kB Sean O'Brien Jul 31, 2013 13:09 Jul 31, 2013 13:09
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Page: g-line Process for SVG Track and GCA Stepper
JPEG File 5a 5um under dev.jpg 99 kB Sean O'Brien Jul 31, 2013 11:11 Jul 31, 2013 11:11
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Page: Metal Lift-off Using a Bi-layer Process
JPEG File 5a 5um.jpg 101 kB Sean O'Brien Jul 31, 2013 11:10 Jul 31, 2013 11:10
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Page: Metal Lift-off Using a Bi-layer Process
PDF File 650C POLY 042109.pdf 34 kB Sean O'Brien Jul 30, 2013 14:15 Jul 30, 2013 14:15
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Page: Polysilicon Deposition
PDF File 630C POLY 012510.pdf 34 kB Sean O'Brien Jul 30, 2013 14:15 Jul 30, 2013 14:15
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Page: Polysilicon Deposition
PDF File 610C POLY 042109.pdf 34 kB Sean O'Brien Jul 30, 2013 14:15 Jul 30, 2013 14:15
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Page: Polysilicon Deposition
PDF File LTO 051308.pdf 35 kB Sean O'Brien Jul 30, 2013 14:10 Jul 30, 2013 14:10
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Page: Low Temperature Oxide Deposition
PDF File How_can_I_prevent_laboratory_accidents.pdf 93 kB Thomas Grimsley Jul 30, 2013 11:21 Jul 30, 2013 11:21
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Page: Information & Updates
PDF File How_can_I_prevent_laboratory_accidents.pdf 93 kB Thomas Grimsley Jul 30, 2013 11:18 Jul 30, 2013 11:18
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Page: Safety in the SMFL
PDF File STO NITRIDE.pdf 6 kB Sean O'Brien Jul 30, 2013 10:55 Jul 30, 2013 10:55
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Page: Silicon Nitride Deposition
PDF File STO_NITRIDE_042109.pdf 36 kB Sean O'Brien Jul 30, 2013 10:23 Jul 30, 2013 10:23
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Page: Silicon Nitride Deposition
PDF File Low Pressure Nitride 012510.pdf 36 kB Sean O'Brien Jul 30, 2013 10:07 Jul 30, 2013 10:07
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Page: Silicon Nitride Deposition
PDF File FACTORY NITRIDE 042109.pdf 36 kB Sean O'Brien Jul 30, 2013 10:07 Jul 30, 2013 10:07
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Page: Silicon Nitride Deposition
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